Compositional Profile of Graded VCSEL DBRs
نویسندگان
چکیده
The compositional profile of graded distributed Bragg reflectors (DBRs) in vertical-cavity surface-emitting lasers (VCSELs) is investigated. Molecular flux measurements allow to determine small differences between the nominal profile and the epitaxially grown structures. These small differences explain completely the suppression of the higher-order satellites in the HRXRD (high-resolution x-ray diffraction) spectra.
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